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Publications information icon

Fabrication of SOI micromechanical devices: Dissertation

Open access
Kiihamäki, Jyrki
VTT Publications2005Publications information icon

14 MHz micromechanical oscillator

Peer-reviewed
DOI
10.1016/S0924-4247(01)00813-5
Mattila, Tomi; Jaakkola, Olli; Kiihamäki, Jyrki; Karttunen, Jani; Lamminmäki, Tuomas; Rantakari, P.;...
Sensors and Actuators A: Physical2002Publications information icon

14 MHz Micromechanical Oscillator

Peer-reviewed
Mattila, T.; Jaakkola, O.; Kiihamäki, Jyrki; Karttunen, J.; Lamminmäki, T.; Rantakari, P.; Oja, A.; ...
-2001Publications information icon

Lattice impurity-related stress in micromechanical silicon devices

Sievilä, Päivi; Tittonen, Ilkka
-2013Publications information icon

Micromechanical mirror for Fourier transform interferometry

Antila, Jarkko; Oja, Aarne; Saari, Heikki
Helsinki University of Technology Publications in Engineering Physics A2003Publications information icon

Silicon Micromechanical Resonators for RF- Applications

Peer-reviewed
Mattila, Tomi; Kaajakari, Ville; Kiihamäki, Jyrki; Oja, Aarne; Kattelus, Hannu; Seppä, Heikki; Koske...
Physica Scripta2004Publications information icon

A 12 MHz micromechanical bulk acoustic mode oscillator

Peer-reviewed
DOI
10.1016/S0924-4247(02)00204-2
Mattila, Tomi; Kiihamäki, Jyrki; Lamminmäki, Tuomas; Jaakkola, Olli; Rantakari, Pekka; Oja, Aarne; S...
Sensors and Actuators A: Physical2002Publications information icon

Micromechanical modelling of functionally graded materials

Peer-reviewed
Gasik, M.
Computational Materials Science1998Publications information icon

Scanning micromechanical mirror for fine-pointing units of intersatellite optical links

Peer-reviewed
DOI
10.1088/0964-1726/10/6/309
Suhonen, Mika; Graeffe, Jussi; Sillanpää, Teuvo; Sipola, Hannu; Eiden, Michael
Smart Materials and Structures2001Publications information icon

Micromechanical analysis of kinematic hardening in natural clay

Peer-reviewed
Yin, Zhen-Yu; Chang, Chingshung; Hicher, Pierre-Yves; Karstunen, Minna
International Journal of Plasticity2009

Fabrication of SOI micromechanical devices: Dissertation

Open access
2005

14 MHz micromechanical oscillator

Peer-reviewed
DOI
10.1016/S0924-4247(01)00813-5
2002

14 MHz Micromechanical Oscillator

Peer-reviewed
2001

Lattice impurity-related stress in micromechanical silicon devices

2013

Micromechanical mirror for Fourier transform interferometry

2003

Silicon Micromechanical Resonators for RF- Applications

Peer-reviewed
2004

A 12 MHz micromechanical bulk acoustic mode oscillator

Peer-reviewed
DOI
10.1016/S0924-4247(02)00204-2
2002

Micromechanical modelling of functionally graded materials

Peer-reviewed
1998

Scanning micromechanical mirror for fine-pointing units of intersatellite optical links

Peer-reviewed
DOI
10.1088/0964-1726/10/6/309
2001

Micromechanical analysis of kinematic hardening in natural clay

Peer-reviewed
2009